序号

标准号

标准英文名称

1

ISO 1608-1:1993

Vapour vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)

2

ISO 1608-2:1989

Vapour vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of critical backing pressure

3

ISO 1609:1986

Vacuum technology — Flange dimensions

4

ISO 2861:2013

Vacuum technology — Dimensions of clamped-type quick-release couplings

5

ISO 3529-1:2019

Vacuum technology — Vocabulary — Part 1: General terms

6

ISO 3529-2:1981

Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms

7

ISO 3529-3:2014

Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges

8

ISO 3530:1979

Vacuum technology — Mass-spectrometer-type leak-detector calibration

9

ISO 3567:2011

Vacuum gauges — Calibration by direct comparison with a reference gauge

10

ISO 3669:2017

Vacuum technology — Bakeable flanges — Dimensions of knife-edge flanges

11

ISO 9803-1:2007

Vacuum technology — Mounting dimensions of pipeline fittings — Part 1: Non knife-edge flange type

12

ISO 9803-2:2007

Vacuum technology — Mounting dimensions of pipeline fittings — Part 2: Knife-edge flange type

13

ISO 14291:2012

Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers

14

ISO 19685:2017

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges

15

ISO 20146:2019

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

16

ISO/TS 20175:2018

Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement

17

ISO/TS 20177:2018

Vacuum technology — Vacuum gauges — Procedures to measure and report outgassing rates

18

ISO 21358:2007

Vacuum technology — Right-angle valve — Dimensions and interfaces for pneumatic actuator

19

ISO 21360-1:2012

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description

20

ISO 21360-2:2012

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps

21

ISO 21360-3:2019

Vacuum technology — Standard methods for measuring vacuum pump performance — Part 3: Specific parameters for mechanical booster vacuum pumps

22

ISO 21360-4:2018

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps

23

ISO 27892:2010

Vacuum technology — Turbomolecular pumps — Measurement of rapid shutdown torque

24

ISO 27893:2011

Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge

25

ISO 27894:2009

Vacuum technology — Vacuum gauges — Specifications for hot cathode ionization gauges

26

ISO 27895:2009

Vacuum technology — Valves — Leak test